Semiconductor Manufacturing
Solution
Semiconductor Manufacturing
Hydrogen is an essential process gas in semiconductor manufacturing, used in processes such as epitaxy, annealing, and deposition. With points of use spread across the fab, from the gas supply yard and piping to process tools, e-Vehicle’s MEMS hydrogen sensing technology helps fabs keep track of hydrogen conditions from the supply end to the tool end.
Process Gas SupplyGas Cabinets & Valve BoxesProcess ToolsFacility Monitoring
Scenarios & Challenges
From supply to tool, every point needs to be monitored
Points of use across the fab
Hydrogen travels from the gas supply yard through long runs of piping to each tool, passing many valves and fittings along the way, and any of them can become a leak point.
Gas cabinets and valve boxes
Gas cabinets and valve manifold boxes concentrate large numbers of valves and pressure regulators, making them key areas for gas detection in the fab.
A line that cannot stop
Downtime in a fab is extremely costly, so gas monitoring must stay stable and reliable over the long term to protect both safety and production.
MEMS Sensing Technology
MEMS hydrogen sensing, built for fab needs
0–40,000 ppmDetection range
Covers the range from trace leaks up to the lower explosive limit (4 vol%), catching rising concentrations early.
Dual sensing principlesThermal conductivity + catalytic combustion
The two sensing principles complement each other to improve long-term stability, keeping the product within its initial tolerance even after extended use.
Long-term stabilityEasier at scale
Fabs have a very large number of monitoring points. Stable long-term performance helps reduce recalibration and eases the maintenance load on facility teams.
< 40 mA / 4.5–36 VEasy integration
Low power consumption and a wide operating voltage make it easy to integrate into the monitoring systems of gas cabinets, valve boxes, or process tools.
Recommended Monitoring Points
Place monitoring points along the hydrogen path
Hydrogen supply and storage areas
Around hydrogen storage, pressure regulation stations, and the start of supply lines, to catch leaks at the source.
Gas cabinets and valve boxes
At the top of cabinet and box interiors, and around valves and fittings.
Process tool gas boxes
At the gas supply boxes and connections of process tools, to monitor conditions where hydrogen enters the tool.
Piping routes and high points
Along piping joints and valves, and at high points where hydrogen tends to gather.
Actual monitoring locations and quantities should be planned according to facility standards, site conditions, and local regulations. e-Vehicle can help you work through the configuration.
Recommended Products
Choose the right solution for each location
Fixed hydrogen detector
HN01001 Hydrogen Sensor
Thermal Conductivity4 vol% H₂ full scaleEx d IIC T5IP65
With explosion-proof and ingress protection ratings, alarm output, and 4–20 mA analog output for connection to facility monitoring systems, it suits fixed installation points such as gas supply yards and hydrogen storage areas.
View ProductEquipment integration
Custom MEMS Hydrogen Sensing Solutions
0–40,000 ppm< 40 mA4.5–36 V
Custom sensing solutions that can be built into gas cabinets, valve boxes, or process tools, designed around your equipment specifications and operating environment.
Inquire About Custom SolutionsPlan hydrogen monitoring for your fab
Download the product datasheet, or tell us about your fab and processes, and the e-Vehicle team will help you assess the right sensing configuration.
Download DatasheetContact UsSolution｜解決方案
半導體製造
氫氣是半導體製造中不可或缺的製程氣體，磊晶、退火與沉積等製程都會使用。從供氣站、管線到製程機台，廠內的用氫點遍布各處。奕微科以 MEMS 氫氣感測技術，協助晶圓廠從供氣端到機台端，全面掌握氫氣狀態。
製程供氣氣瓶櫃與閥箱製程機台廠務監控
場景與挑戰
從供氣端到機台端，每一處都需要被監測
用氫點遍布全廠
氫氣從供氣站經長距離管線送到各機台，沿途的閥件與接頭眾多，每一處都可能是洩漏點。
氣瓶櫃與閥箱
氣瓶櫃與閥箱集中了大量的閥件與調壓設備，是廠內氣體偵測的重點區域。
產線不能停
晶圓廠停機的成本極高，氣體監測系統必須長期穩定可靠，才能兼顧安全與產線運作。
MEMS 感測技術
以 MEMS 氫氣感測，回應晶圓廠的需求
0–40,000 ppm偵測範圍
涵蓋從微量洩漏到爆炸下限（4 vol%）的範圍，在濃度上升初期就能察覺。
雙感測原理熱傳導式＋接觸燃燒式
兩種感測原理相輔相成，提升長期運作的穩定性，產品在長時間使用後仍能維持於初始誤差範圍之內。
長期穩定大量布點更省心
晶圓廠的監測點數量龐大。長期穩定的感測表現，有助於減少重新校正的次數，降低廠務維護負擔。
< 40 mA／4.5–36 V易於整合
低功耗與寬工作電壓，容易整合進氣瓶櫃、閥箱或製程機台的監控系統。
建議監測位置
沿著氫氣的路徑，設置監測點
氫氣供應站與儲存區
儲氫設備、調壓站與供氣管線起點，從源頭掌握洩漏。
氣瓶櫃與閥箱
櫃體與箱體內部的上方，以及閥件、接頭周邊。
製程機台氣體箱
機台的氣體供應箱與連接處，監測氫氣進入機台前後的狀況。
管線路徑與高處
管線接頭與閥件沿線，以及氫氣容易聚集的高處空間。
實際的監測位置與數量，請依廠務規範、現場條件與當地法規評估規劃；奕微科可協助您進行配置討論。
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